JPH0531094Y2 - - Google Patents

Info

Publication number
JPH0531094Y2
JPH0531094Y2 JP1986054020U JP5402086U JPH0531094Y2 JP H0531094 Y2 JPH0531094 Y2 JP H0531094Y2 JP 1986054020 U JP1986054020 U JP 1986054020U JP 5402086 U JP5402086 U JP 5402086U JP H0531094 Y2 JPH0531094 Y2 JP H0531094Y2
Authority
JP
Japan
Prior art keywords
cylinder
piston
pressurizing chamber
nozzle
container body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986054020U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62165251U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986054020U priority Critical patent/JPH0531094Y2/ja
Publication of JPS62165251U publication Critical patent/JPS62165251U/ja
Application granted granted Critical
Publication of JPH0531094Y2 publication Critical patent/JPH0531094Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Closures For Containers (AREA)
JP1986054020U 1986-04-09 1986-04-09 Expired - Lifetime JPH0531094Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986054020U JPH0531094Y2 (en]) 1986-04-09 1986-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986054020U JPH0531094Y2 (en]) 1986-04-09 1986-04-09

Publications (2)

Publication Number Publication Date
JPS62165251U JPS62165251U (en]) 1987-10-20
JPH0531094Y2 true JPH0531094Y2 (en]) 1993-08-10

Family

ID=30880621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986054020U Expired - Lifetime JPH0531094Y2 (en]) 1986-04-09 1986-04-09

Country Status (1)

Country Link
JP (1) JPH0531094Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077415A (ja) * 2001-09-05 2003-03-14 Mitsubishi Electric Corp イオン注入装置およびそのイオン注入装置を用いた半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574610Y2 (en]) * 1977-06-22 1982-01-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003077415A (ja) * 2001-09-05 2003-03-14 Mitsubishi Electric Corp イオン注入装置およびそのイオン注入装置を用いた半導体装置の製造方法

Also Published As

Publication number Publication date
JPS62165251U (en]) 1987-10-20

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